JPS637841Y2 - - Google Patents
Info
- Publication number
- JPS637841Y2 JPS637841Y2 JP4103782U JP4103782U JPS637841Y2 JP S637841 Y2 JPS637841 Y2 JP S637841Y2 JP 4103782 U JP4103782 U JP 4103782U JP 4103782 U JP4103782 U JP 4103782U JP S637841 Y2 JPS637841 Y2 JP S637841Y2
- Authority
- JP
- Japan
- Prior art keywords
- support
- measuring device
- wafer
- plate thickness
- height adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007246 mechanism Effects 0.000 claims description 10
- 235000012431 wafers Nutrition 0.000 description 21
- 238000005259 measurement Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 241001422033 Thestylus Species 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4103782U JPS58144211U (ja) | 1982-03-25 | 1982-03-25 | 板厚測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4103782U JPS58144211U (ja) | 1982-03-25 | 1982-03-25 | 板厚測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58144211U JPS58144211U (ja) | 1983-09-28 |
| JPS637841Y2 true JPS637841Y2 (en]) | 1988-03-08 |
Family
ID=30052232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4103782U Granted JPS58144211U (ja) | 1982-03-25 | 1982-03-25 | 板厚測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58144211U (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5656390B2 (ja) * | 2009-11-26 | 2015-01-21 | 株式会社クボタ | 管厚測定装置および管厚測定方法 |
-
1982
- 1982-03-25 JP JP4103782U patent/JPS58144211U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS58144211U (ja) | 1983-09-28 |
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